Information About

Catalog description

Introduction to microelectromechanical devices with an emphasis on their manufacturing and mechanical behavior. Material properties, microfabrication technology, mechanical behavior of of microstructures, design and packaging. Case studies of sensors, wireless communications, fluidic systems, micro engines, and biological devices.

Prerequisites: CIV ENG 216 or consent of instructor.

Who takes it

Undergraduate and graduate students interested in the physics and design of microsensors, size scale in MEMS materials, micro and nanomanipulation, etc. should take this course.

What it's about

MEMS is an emerging technology that is attracting significant attention in the engineering, chemistry and biology communities. The NSF (National Science Foundation) and NIH (National Institute of Health) consider MEMS one of the main research areas of the decade. MEMS were successfully utilized in breakthrough applications, such as accelerometers for air bag deployment in automobiles, and digital mirrors for high-resolution display. Currently, MEMS for cancer cell detection, manipulation of bio-molecules, artificial retina and neural activity measurements, are being developed.

What will you learn in this class:

• Microfabrication techniques
• Thin film material properties (constitutive laws and size effects)
• Mechanical behavior of microstructures
• Sensing and actuation of mechanical, optical, microfluidic devices
• Case studies: accelerometers, RF-switches, micro-engines, digital mirrors, and fluidic systems

Assessment/Evaluation:

Homework will be assigned on a regular basis. There is a mid-term exam and final project.

Contact:

Professor: Horacio D. Espinosa
e-mail: espinosa@northwestern.edu

[ Detailed syllabus | Course web site ]